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Official Course Information

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Fall 2021

Nanoscience Technology Courses:

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NST206 - Vacuum Systems and Nanotechnology Applications

Credits: 3

Catalog Description: Introduces vacuum systems design, operation and troubleshooting; physical and chemical vapor deposition applications; plasmas and materials; plasma removal process; advanced etch systems; dielectric creation by growth and deposition; application of Nanotechnology to organic solar cells. Pre-requisites: NST 201

Lecture: 2 hrs.

Lab: 2 hrs.

Course Learning Outcomes (CLOs):
Upon successful completion of this course, the student will be able to:

1. Demonstrate detailed understanding of principles of vacuum based systems and their
2. Operate, maintain and troubleshoot various vacuum systems.
3. Demonstrate an understanding of and proficiency in the applications of plasma based
processes to nanofabrication.
4. Demonstrate an understanding of chemical vapor deposition processes and systems.
5. Perform furnace deposition with dry or wet oxidation.
6. Effectively work as a member of technical team on laboratory assignments.
*7. Make an effective presentation of a research or design topic.

* This course objective has been identified as a student learning outcome that must be formally assessed as part of the Comprehensive Assessment Plan of the college. All faculty teaching this course must collect the required data and submit the required analysis and documentation at the conclusion of the semester to the Office of Institutional Research and Assessment.

Content Outline:
1. Vacuum systems
2. Physical and chemical vapor deposition
3. Plasmas and materials
4. Plasma removal process
5. Advanced etch systems
6. Dielectrics fabrication by growth and deposition
7. Application of nanotechnology to organic solar cells

Effective Term: Fall 2015